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Predictive Modeling of TiN Coating Roughness

Mohamad Jaya, Abdul Syukor and Mohd Hashim, Siti Zaiton and Haron, Habibollah and Muhamad, Mohd Razali and Abd. Rahman, Md. Nizam and Hasan Basari, Abd Samad (2013) Predictive Modeling of TiN Coating Roughness. Advanced Materials Research, 626 (2013). pp. 219-223. ISSN 1662-8985

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Abstract

In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variables. Coating surface roughness as an important coating characteristic was characterized using Atomic Force Microscopy (AFM) equipment. Analysis of variance (ANOVA) is used to determine the significant factors influencing resultant TiN coating roughness. Based on that, a quadratic polynomial model equation represented the process variables and coating roughness was developed. The result indicated that the actual coating roughness of validation runs data fell within the 90% prediction interval (PI) and the residual errors were very low. The findings from this study suggested that Argon pressure, quadratic term of N2 pressure, quadratic term of turntable speed, interaction between N2 pressure and turntable speed, and interaction between Argon pressure and turntable speed influenced the TiN coating surface roughness.

Item Type: Article
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Manufacturing Engineering > Department of Manufacturing Process
Faculty of Information and Communication Technology > Department of Industrial Computing
Depositing User: Mr. Abdul Syukor Mohamad Jaya
Date Deposited: 20 Jan 2014 13:58
Last Modified: 28 May 2015 04:12
URI: http://eprints.utem.edu.my/id/eprint/10670

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