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Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator

Md Ghazaly, Mariam (2012) Friction Characteristic Switching Function and Ultra-Precision Positioning of Multilayer Electrostatic Actuator. In: 2012 JSPE Spring Meeting (2012), March 2012, Japan.

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Abstract

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Electrical Engineering > Department of Mechatronics Engineering
Depositing User: DR. MARIAM MD GHAZALY
Date Deposited: 30 Jan 2014 07:25
Last Modified: 28 May 2015 04:14
URI: http://eprints.utem.edu.my/id/eprint/10987

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