Pam mikro terma pneumatik dengan aktuator membran filem nipis polimid untuk kegunaan bioperubatan

Norihan , Abdul Hamid (2014) Pam mikro terma pneumatik dengan aktuator membran filem nipis polimid untuk kegunaan bioperubatan. PhD thesis, UTeM.

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Thermo-pneumatic micropump is a micro device that currently used in BioMEMS where indispensable transportation and accurate dosing of fluid can be achieved. Basically, thermo-pneumatic micropump is a miniaturization of electromechanical device that uses the thermal expansion concept to actuate a thin film membran for pumping purposes. Issues arise during transporting fluid in drug delivery system are device miniaturization, reliability, life expectancy, clogging and biocompatibility. The crucial part in the development of thermo-pneumatic micropump is to fabricate a thin film actuator membran using a simple, low cost and reproducible MEMS technique. By reducing the membran thickness it will increase its deformation capability. However, the geometrical consideration on the micropump system at small scale may influence the fluid transport characterization. Therefore in this thesis, a design and fabrication technology of thermopneumatic micropump implementing polyimide based membran for actuation purpose is presented. This pump system consists of three basic components including micro heater, thin film membran with heater chamber and planar diffuser/nozzle element. The pump development includes the design, fabrication, measurement and testing of the component. Surface and bulk micromachining techniques were used for the micro heater and thin film membran fabrication, while planar diffuser/nozzle element is fabricated using soft lithography process. Corona treatment procedure is implemented to prevent fluid leakage in the microfluidic part. The three micropump components are then bonded together using adhesive bonding technique. The functionality of the micropump is then tested by supplying DC Voltage to the micro heater and observing the membran deflection thus transporting the fluid from storage into another fluidic system. As a result, the lowest resistance for the fabricated micro heater element of 50.8 Ω is achieved with a maximum temperature of 121°C. While maximum deflection of 3-4 um thick polyimide membran is about 65 μm for temperature chamber increases up to 65oC. The functionality test of completed micropump system shows that maximum flow rate is up to 12.5 nL/min for an input voltage of 12 Vdc and a driving power of 416.3 mW.

Item Type: Thesis (PhD)
Uncontrolled Keywords: BioMEMS
Subjects: T Technology > TP Chemical technology
Divisions: Library > Tesis > FKEKK
Depositing User: Norziyana Hanipah
Date Deposited: 10 Sep 2015 04:33
Last Modified: 10 Sep 2015 04:33
Statistic Details: View Download Statistic

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