Razman, Harriman and Awang Md Isa, Azmi and Suaidi, Mohamad Kadim (2022) Experimental quantification of electrostatic damage (ESD) in binary reticle with feature of nanometre scale gaps. Przeglad Elektrotechniczny, 98 (3). 60 - 63. ISSN 0033-2097
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ARTICLE PUBLISHED EXPERIMENTAL QUANTIFICATION OF ESD IN BINARY RETICLE.PDF Download (348kB) |
Abstract
A Binary reticle for lithography circuit patterning is extremerly senstive to electrostatic field. Damaged is seen on its feature after a breakdown voltage occurred between the metal lines. The experimental quantification of ESD for Binary reticle is performed by direct discharge to the feature of Critical Dimension (CD) of 80 nm to 160 nm. Its breakdown voltage correlated to CD but lower than international standard recommendations and observed Electric Field-Induced Migration (EFM) damaged at CD of < 110 nm but ESD for CD > 110 nm to 160 nm.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | EFM, ESD, Paschen law, Townsend-Fowler Nordheim field emission |
| Divisions: | Faculty of Electronics and Computer Engineering |
| Depositing User: | Sabariah Ismail |
| Date Deposited: | 02 Mar 2023 12:08 |
| Last Modified: | 02 Mar 2023 12:08 |
| URI: | http://eprints.utem.edu.my/id/eprint/26215 |
| Statistic Details: | View Download Statistic |
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