Items where Author is "Hao, X."
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Md Fauadi, Muhammad Hafidz Fazli and Ramlan, Samad and Razali, N.H. and Hao, X. (2021) Agent-based chemical mechanical planarization qualification for semiconductor wafer fabrication. Journal of Advanced Manufacturing Technology, 15 (3). pp. 41-53. ISSN 1985-3157