Items where Author is "Khairul Anuar, Abd Rahman"
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Hashim, Hanizam and Md Nizam, Abd Rahman and Noraiham, Mohamad and Khairul Anuar, Abd Rahman (2013) The Effect of Pulse DC and DC Substrate Bias during In Situ Cleaning PVD Process on Surface Roughness. The Effect of Pulse DC and DC Substrate Bias during In Situ Cleaning PVD Process on Surface Roughness, 53 (20 (10.101). pp. 562-568. ISSN 1877-7058