Design And Analysis Of MEMS Capacitive Accelerometer With Optimized Sensitivity

Khairun Nisa, Khamil (2014) Design And Analysis Of MEMS Capacitive Accelerometer With Optimized Sensitivity. Masters thesis, Universiti Teknikal Malaysia Melaka.

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Abstract

Nowadays, numerous research studies have been done on MEMS based micro-accelerometer that focuses on optimizing the device sensitivity. With a smaller size compared to the conventional design of the accelerometer, it weighs lesser, functions more efficiently which then contributes to cheaper manufacturing cost. The selection of type and model of the MEMS accelerometer is important before the design parameter can be determined. The relationship between mass width, beam (length and width) and the device sensitivity are investigated. After the theoretical analysis has been calculated, the FEM simulation is then done by constructing three dimensional model structures and the displacement sensitivity of the device is simulated. The result from the simulation proved that it matches the theoretical analysis. The optimization analysis concluded that desired sensitivity can be achieved by adding number of fingers and adjusting the length of the beam. The optimizing method used in this project is based on trial and error technique. From the simulation result, the device has a displacement sensitivity of 3.5301 nm/g which showed that the MEMS accelerometer sensitivity has been optimized. By using this recommended MEMS capacitive accelerometer, an airbag deployment system in automobiles with the capability to withstand extensive range of shock can be designed.

Item Type: Thesis (Masters)
Uncontrolled Keywords: Microelectronics, Microelectromechanical systems, Microelectronic packaging, Accelerometers
Subjects: T Technology > T Technology (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Library > Tesis > FKEKK
Depositing User: Nor Aini Md. Jali
Date Deposited: 12 Apr 2016 02:48
Last Modified: 12 Apr 2016 02:48
URI: http://eprints.utem.edu.my/id/eprint/16164
Statistic Details: View Download Statistic

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