Modeling of TiN coating thickness using ANFIS

Abdul Syukor, Mohamad Jaya and Abd. Samad, Hasan Basari and Sazalinsyah, Razali and Muhd Razali, Muhamad and Md. Nizam, Ab. Rahman (2014) Modeling of TiN coating thickness using ANFIS. Trans Tech Publications, Switzerland.

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In this paper, an approach in predicting thickness of Titanium Aluminum Nitrite (TiN) coatings using Adaptive Network Based Fuzzy Inference System (ANFIS) is implemented. The TiN coatings were coated on tungsten carbide (WC) using Physical Vapor Deposition (PVD) magnetron sputtering process. The N2 pressure, argon pressure and turntable speed were selected as the input parameters and the coating thickness as an output of the process. Response Surface Methodology (RSM) was used to design the matrix in collecting the experimental data. In the ANFIS structure, three bell shapes were used as input membership function (MFs). The collected experimental data was used to train the ANFIS model. Then, the ANFIS model was validated with confirmatory test data and compared with other prediction models in terms of the root mean square error (RMSE), residual error and prediction accuracy. The result indicated that the developed ANFIS model result was the lowest RMSE7 and average residual error, besides the highest in prediction accuracy compared to the other models. The result also indicated that the limited experimental data could be used in training the ANFIS model and resulting accurate predictive result.

Item Type: Book
Uncontrolled Keywords: ANFIS, TiN, thickness, modeling, sputtering, PVD
Subjects: T Technology > TS Manufactures
Divisions: Faculty of Manufacturing Engineering > Department of Manufacturing Process
Faculty of Information and Communication Technology > Department of Industrial Computing
Depositing User: Mr. Abdul Syukor Mohamad Jaya
Date Deposited: 26 Jan 2015 05:01
Last Modified: 28 May 2015 04:36
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