Modeling of TiN coating thickness using RSM approach

Mohamad Jaya, Abdul Syukor and Mohd Hashim, Siti Zaiton and Haron, Habibollah and Muhamad, Mohd Razali and Hasan Basari, Abd Samad and Abd. Rahman, Md. Nizam (2014) Modeling of TiN coating thickness using RSM approach. Key Engineering Materials, 594 (595). pp. 556-560. ISSN 1662-9795

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Abstract

In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variables while the coating thickness as output response. The coating thickness as an important coating characteristic was measured using surface profilometer equipment. Analysis of variance (ANOVA) was used to determine the significant factors influencing TiN coating thickness. Then, a polynomial linear model represented the process variables and coating thickness was developed. The result indicated that the actual validation data fell within the 90% prediction interval (PI) and the percentage of the residual errors were low. Findings from this study suggested that Argon pressure, N2 pressure and turntable speed influenced the TiN coating thickness.

Item Type:	Article
Uncontrolled Keywords:	TiN, thickness, modeling, sputtering, PVD, RSM
Divisions:	Faculty of Information and Communication Technology > Department of Industrial Computing
Depositing User:	Dr. Abd. Samad Hasan Basari
Date Deposited:	10 Feb 2015 00:27
Last Modified:	08 Jun 2023 10:37
URI:	http://eprints.utem.edu.my/id/eprint/14194
Statistic Details:	View Download Statistic

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