Microheater: material, design, fabrication, temperature control, and applications—a role in COVID‑19

Narayanamurthy, Vigneswaran and Kumaravel Shanmugavel, Bhuvaneshwari and Samsuri, Fahmi and Jeroish, Z. E. (2022) Microheater: material, design, fabrication, temperature control, and applications—a role in COVID‑19. Biomedical Microdevices, 24 (1). pp. 1-49. ISSN 1387-2176

Text MICROHEATER MATERIAL, DESIGN, FABRICATION, TEMPERATURE CONTROL, AND APPLICATIONS-A ROLE IN COVID-19.PDF Download (8MB)

Abstract

Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or microwave radiation. For fast switching and continuous applications, hotplate or Peltier elements can be employed. However, due to bulkiness, they are inefective for portable applications or operation at remote locations. Miniaturization of heaters reduces power consumption and bulkiness, enhances the thermal response, and integrates with several sensors or microfuidic chips. The microheater has a thickness of~100 nm to~100 μm and ofers a temperature range up to 1900℃ with precise control. In recent years, due to the escalating demand for fexible electronics, thin-flm microheaters have emerged as an imperative research area. This review provides an overview of recent advancements in microheater as well as analyses diferent microheater designs, materials, fabrication, and temperature control. In addition, the applications of microheaters in gas sensing, biological, and electrical and mechanical sectors are emphasized. Moreover, the maximum temperature, voltage, power consumption, response time, and heating rate of each microheater are tabulated. Finally, we addressed the specifc key considerations for designing and fabricating a microheater as well as the importance of microheater integration in COVID-19 diagnostic kits. This review thereby provides general guidelines to researchers to integrate microheater in micro-electromechanical systems (MEMS), which may pave the way for developing rapid and large-scale SARS-CoV-2 diagnostic kits in resource-constrained clinical or home-based environments.

Item Type:	Article
Uncontrolled Keywords:	Heater, Microheater, Micro hot plate, Temperature control, Thin-flm heater, Gas sensor
Divisions:	Faculty of Electrical and Electronic Engineering Technology
Depositing User:	Norfaradilla Idayu Ab. Ghafar
Date Deposited:	06 Mar 2023 11:48
Last Modified:	06 Mar 2023 11:48
URI:	http://eprints.utem.edu.my/id/eprint/26273
Statistic Details:	View Download Statistic

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