Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique

Kok, Swee Leong and White, Neil and Nick, Harris (2008) Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique. In: Electroceramics XI, 1 - 3 September 2008, Manchester, UK..

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Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it was possible to fabricate a flat, but angled cantilever. In this work, sandwich structures consisting of PZT layers and Ag/Pd conductors, with in either interdigitated (IDT) or plated electrode configurations were fabricated in order to investigate the structural strength and the characteristics of free-standing structures. Screen printed carbon was used as a sacrificial layer. In the final step of the process, this was burnt out at a temperature of 850 C in an air environment. This resulted in a free-standing, sandwich structure of PZT-Ag/Pd. In order to reduce the problems of process complexity, a one-step firing process was used, whereby the sacrificial layer was co-fired together with PZT-Ag/Pd layers. The measurement results showed that the materials have a piezoelectric charge coefficient, d31 of -25 pC/N and coupling coefficient, k31 of 0.125. The cantilever structures were found to have a maximum Q-factor of around 200, and produced useful amounts of electrical power when driving resistive loads at low acceleration levels.

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Electronics and Computer Engineering > Department of Industrial Electronics
Depositing User: Dr. Swee Leong Kok
Date Deposited: 19 Jul 2012 15:13
Last Modified: 28 May 2015 02:41
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