Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures

White, Neil and Harris, Nick and Kok, Swee Leong and Tudor, John (2008) Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures. In: 2nd Electronics System-Integration Technology, 1 - 4 September 2008, Greenwich, London..

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Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 μm. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 kΩ resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2.

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Electronics and Computer Engineering > Department of Industrial Electronics
Depositing User: Dr. Swee Leong Kok
Date Deposited: 19 Jul 2012 15:10
Last Modified: 28 May 2015 02:41
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