Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication

Md Ghazaly, Mariam (2011) Evaluation of a Multilayer Electrostatic Actuator for a Fine Motion Stage without Precise Balls for Lubrication. In: The 6th International Conference on Micromanufacturing (ICOMM2011), 7 - 10 March 2011, Tokyo, Japan.

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This paper outlines the basic characteristics and the control performances of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to realize a practical and simple multilayer electrostatic actuator that produces high precision motion and sufficient force for a fine motion stage. For this purpose, a two-layer electrostatic actuator was developed and evaluated. Lubrication oils are used as lubricants in order to obtain low friction by maintaining the gaps between the stator and mover layers without precise balls for simplicity and easy maintenance. Each layer of the electrostatic actuator has one electrode, which consists of several beams. The motion characteristics of the electrostatic actuator without precise balls depend on the input signal to the actuator, which consequently influences the frictional effect. First, this paper examines the resultant effects of the driving signals on the motion characteristics. Next, based on the driving signal, the control system for the actuator is designed. The control system includes the PID compensator and the driving signal unit which generates the suitable signal for full working range motion. The actuator exhibits the positioning accuracy better than 15nm.

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Electrical Engineering > Department of Mechatronics Engineering
Depositing User: DR. MARIAM MD GHAZALY
Date Deposited: 31 Jul 2013 08:48
Last Modified: 28 May 2015 04:00
URI: http://eprints.utem.edu.my/id/eprint/8972
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