Md Ghazaly, Mariam (2012) Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids. In: 2012 JSPE Autumn Meeting (2012), September 2012, Japan.
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Abstract
The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TJ Mechanical engineering and machinery T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Electrical Engineering > Department of Mechatronics Engineering |
| Depositing User: | DR. MARIAM MD GHAZALY |
| Date Deposited: | 30 Jan 2014 07:25 |
| Last Modified: | 28 May 2015 04:14 |
| URI: | http://eprints.utem.edu.my/id/eprint/10984 |
| Statistic Details: | View Download Statistic |
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