Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid

Md Ghazaly, Mariam (2012) Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid. In: Proceedings of the 4th International Conference on Positioning Technology (ICPT2012), 2012 Nov , Kaohsiung, Taiwan.

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Abstract

The present paper describes Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid.

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Electrical Engineering > Department of Mechatronics Engineering
Depositing User: DR. MARIAM MD GHAZALY
Date Deposited: 27 Oct 2014 15:39
Last Modified: 28 May 2015 04:14
URI: http://eprints.utem.edu.my/id/eprint/10993
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