A Stack Bonded Thermo-Pneumatic Micro-Pump Utilizing Polyimide Based Actuator Membrane For Biomedical Applications

Norihan, Abdul Hamid and Majlis, Burhanuddin Yeop and Yunas, Jumril and Ahmad Radzi, Syafeeza and Wong, Yan Chiew and Ibrahim , Mazree (2016) A Stack Bonded Thermo-Pneumatic Micro-Pump Utilizing Polyimide Based Actuator Membrane For Biomedical Applications. Microsystem Technologies, 22 (5). pp. 1-9. ISSN 0946-7076

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Abstract

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Item Type:	Article
Uncontrolled Keywords:	PDMS, Polyimide, Nitride Layer, Planar Valve, Thermal Chamber
Subjects:	T Technology > T Technology (General) T Technology > TJ Mechanical engineering and machinery
Divisions:	Faculty of Electronics and Computer Engineering > Department of Computer Engineering
Depositing User:	Muhammad Afiz Ahmad
Date Deposited:	31 Jul 2017 00:53
Last Modified:	23 Jul 2021 13:04
URI:	http://eprints.utem.edu.my/id/eprint/18799
Statistic Details:	View Download Statistic

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