Free-standing thick-film piezoelectric device

Kok, Swee Leong and White, Neil and Harris, Nick (2008) Free-standing thick-film piezoelectric device. Electron. Lett. , 44 (4). pp. 280-282. ISSN 0013-5194

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Abstract

A free-standing thick-film cantilever sensor structure is presented. Such devices find use in applications such as vibration detection or energy harvesting. The structure was fabricated by screen printing layers of lead zirconate titanate between silver/palladium electrodes and cofiring the layers together with a carbon sacrificial layer (deposited underneath) in an air environment at a temperature of 8508C. The free-standing structure, of dimensions 18 mm long by 9 mm wide and thickness of 50 mm, was found to produce electrical powers of up to 95 nW at an acceleration level of 9.81 m/s2 (1 g), when driving a 60 kV load resistance.

Item Type:	Article
Uncontrolled Keywords:	vibrations; thick film sensors; electrodes; piezoelectric devices
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Electronics and Computer Engineering > Department of Industrial Electronics
Depositing User:	Dr. Swee Leong Kok
Date Deposited:	20 Jul 2012 06:35
Last Modified:	05 Jan 2022 09:32
URI:	http://eprints.utem.edu.my/id/eprint/4370
Statistic Details:	View Download Statistic

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