Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning

Md Ghazaly , Mariam (2012) Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning. In: ASPE 2012 Summer Topical Meeting, 24 - 26 June 2012, California, USA.

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Abstract

Fine stages are widely used in microscope systems, optical systems, and manufacturing systems. Electrostatic actuators have some advantages in terms of their low heat production and material availability. They are also able to transmit power without mechanical contact and do not require hinges. In addition, the multilayered structure can increase the produced thrust force.

Item Type:	Conference or Workshop Item (Paper)
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Electrical Engineering > Department of Mechatronics Engineering
Depositing User:	DR. MARIAM MD GHAZALY
Date Deposited:	31 Jul 2013 08:37
Last Modified:	28 May 2015 04:00
URI:	http://eprints.utem.edu.my/id/eprint/8978
Statistic Details:	View Download Statistic

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