Micro-Drilling Of Silicon Wafer By Industrial CO2 Laser

Subramonian, Sivarao and Kasim, Mohd Shahir and Md Ali, Mohd Amran and Raja Abdullah, Raja Izamshah and Anand, T Joseph Sahaya (2015) Micro-Drilling Of Silicon Wafer By Industrial CO2 Laser. International Journal of Mechanical and Materials Engineering , 10 (2). pp. 1-6. ISSN -

Text 45 IJMME 10.pdf - Published Version Download (2MB)

Abstract

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Item Type:	Article
Uncontrolled Keywords:	MEMS; CO2 laser; Silicon wafer; ANOVA
Subjects:	T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General)
Divisions:	Faculty of Manufacturing Engineering
Depositing User:	Muhammad Afiz Ahmad
Date Deposited:	31 Jul 2017 04:55
Last Modified:	28 Jul 2021 19:46
URI:	http://eprints.utem.edu.my/id/eprint/18983
Statistic Details:	View Download Statistic

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