Micro-Drilling Of Silicon Wafer By Industrial CO2 Laser

Subramonian, Sivarao and Kasim, Mohd Shahir and Md Ali, Mohd Amran and Raja Abdullah, Raja Izamshah and Anand, T Joseph Sahaya (2015) Micro-Drilling Of Silicon Wafer By Industrial CO2 Laser. International Journal of Mechanical and Materials Engineering , 10 (2). pp. 1-6. ISSN -

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Abstract

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Item Type: Article
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Manufacturing Engineering
Depositing User: Muhammad Afiz Ahmad
Date Deposited: 31 Jul 2017 04:55
Last Modified: 31 Jul 2017 04:55
URI: http://eprints.utem.edu.my/id/eprint/18983
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